The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2018
Filed:
Feb. 12, 2015
Applicant:
Youtec Co., Ltd., Chiba, JP;
Inventors:
Assignee:
YOUTEC CO., LTD., Chiba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01G 5/00 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); C23F 1/00 (2006.01); H01L 41/187 (2006.01); H01L 41/047 (2006.01); H01L 41/29 (2013.01); H01L 41/318 (2013.01);
U.S. Cl.
CPC ...
C23F 1/00 (2013.01); C23C 14/088 (2013.01); C23C 14/3414 (2013.01); H01L 41/0478 (2013.01); H01L 41/29 (2013.01); C01P 2006/40 (2013.01); H01L 41/1876 (2013.01); H01L 41/318 (2013.01);
Abstract
To obtain a piezoelectric film having excellent piezoelectric properties. An aspect of the present invention relates to ferroelectric ceramics including a first Sr(TiRu)Ofilm and a PZT film formed on the first Sr(TiRu)Ofilm, wherein the x satisfies a formula 1 below.0.01≤≤0.4  formula 1