The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2018
Filed:
Jun. 08, 2015
Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;
National Institute of Advanced Industrial Science and Technology, Chiyoda-ku, Tokyo, JP;
Keiichi Umeda, Nagaokakyo, JP;
Atsushi Honda, Nagaokakyo, JP;
Morito Akiyama, Tosu, JP;
Toshimi Nagase, Tosu, JP;
Keiko Nishikubo, Tosu, JP;
Masato Uehara, Tosu, JP;
MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu, JP;
NATIONAL INSTlTUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, Chiyoda-Ku, Tokyo, JP;
Abstract
A piezoelectric thin film comprising aluminum nitride containing magnesium and hafnium, wherein a content of the hafnium based on 100 atomic % of the magnesium is 8 atomic % or more and less than 100 atomic %, and a total content of the magnesium and hafnium based on a sum of a content of the magnesium, hafnium, and aluminum is in a range of 47 atomic % or less.