The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 15, 2018

Filed:

Oct. 11, 2016
Applicant:

Optiz, Inc., Palo Alto, CA (US);

Inventors:

Vage Oganesian, Sunnyvale, CA (US);

Zhenhua Lu, Suzhou, CN;

Assignee:

Optiz, Inc., Palo Alto, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 31/024 (2014.01); H01L 27/144 (2006.01); H01L 23/13 (2006.01); H01L 23/367 (2006.01); H01L 23/467 (2006.01); H01L 21/48 (2006.01); H01L 23/498 (2006.01); H01L 23/00 (2006.01); H01L 25/18 (2006.01); H01L 31/02 (2006.01);
U.S. Cl.
CPC ...
H01L 31/024 (2013.01); H01L 21/481 (2013.01); H01L 23/13 (2013.01); H01L 23/367 (2013.01); H01L 23/467 (2013.01); H01L 23/49833 (2013.01); H01L 24/16 (2013.01); H01L 24/17 (2013.01); H01L 24/73 (2013.01); H01L 25/18 (2013.01); H01L 27/1446 (2013.01); H01L 31/02002 (2013.01); H01L 31/02005 (2013.01); H01L 31/02019 (2013.01); H01L 23/3672 (2013.01); H01L 23/3677 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/17181 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/73257 (2013.01); H01L 2924/0002 (2013.01); H01L 2924/12043 (2013.01); H01L 2924/1433 (2013.01);
Abstract

A sensor device includes a first substrate of semiconductor material having opposing first and second surfaces, photodetectors configured to receive light impinging on the first surface, and first contact pads each exposed at both the first and second surfaces and electrically coupled to at least one of the photodetectors. A second substrate comprises opposing first and second surfaces, electrical circuits, a second contact pads each disposed at the first surface of the second substrate and electrically coupled to at least one of the electrical circuits, and a plurality of cooling channels formed as first trenches extending into the second surface of the second substrate but not reaching the first surface of the second substrate. The first substrate second surface is mounted to the second substrate first surface such that each of the first contact pads is electrically coupled to at least one of the second contact pads.


Find Patent Forward Citations

Loading…