The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 15, 2018

Filed:

May. 06, 2015
Applicant:

Renesas Electronics Corporation, Kanagawa, JP;

Inventors:

Satoshi Eguchi, Kanagawa, JP;

Tetsuya Iida, Kanagawa, JP;

Akio Ichimura, Kanagawa, JP;

Yuya Abiko, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/06 (2006.01); H01L 21/265 (2006.01); H01L 29/66 (2006.01); H01L 29/40 (2006.01); H01L 29/10 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7811 (2013.01); H01L 21/265 (2013.01); H01L 29/0634 (2013.01); H01L 29/1095 (2013.01); H01L 29/404 (2013.01); H01L 29/66477 (2013.01); H01L 29/66712 (2013.01); H01L 29/0638 (2013.01); H01L 29/42372 (2013.01);
Abstract

To provide a semiconductor device including a power semiconductor element having improved reliability. The semiconductor device has a cell region and a peripheral region formed outside the cell region. The n type impurity concentration of n type column regions in the cell region is made higher than that of n type column regions comprised of an epitaxial layer in the peripheral region. Further, a charge balance is kept in each of the cell region and the peripheral region and each total electric charge is set so that a total electric charge of first p type column regions and a total electric charge of n type column regions in the cell region become larger than a total electric charge of third p type column regions and n type column regions comprised of an epitaxial layer in the peripheral region, respectively.


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