The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2018
Filed:
Mar. 21, 2017
Applicant:
Wisconsin Alumni Research Foundation, Madison, WI (US);
Inventors:
Chang-Beom Eom, Madison, WI (US);
Daesu Lee, Madison, WI (US);
Assignee:
Wisconsin Alumni Research Foundation, Madison, WI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/24 (2006.01); H01L 21/36 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 29/10 (2006.01); H03K 17/51 (2006.01); H01L 45/00 (2006.01); H01L 21/02 (2006.01); H03K 17/687 (2006.01);
U.S. Cl.
CPC ...
H01L 29/24 (2013.01); H01L 21/02414 (2013.01); H01L 21/02483 (2013.01); H01L 21/02565 (2013.01); H01L 29/1033 (2013.01); H01L 29/1079 (2013.01); H01L 29/66969 (2013.01); H01L 29/78 (2013.01); H01L 45/1206 (2013.01); H01L 45/146 (2013.01); H03K 17/51 (2013.01); H03K 17/687 (2013.01);
Abstract
Layers of high quality VOand methods of fabricating the layers of VOare provided. The layers are composed of a plurality of connected crystalline VOdomains having the same crystal structure and the same epitaxial orientation.