The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2018
Filed:
Jun. 12, 2014
Canon Kabushiki Kaisha, Tokyo, JP;
Kenji Yamamoto, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides an imprint apparatus which transfers the pattern of the mold to a target region on the substrate, comprising a control unit configured to align the mold and the target region in a surface direction parallel to a surface of the substrate, and drive at least one of the mold and the substrate so that the mold and an imprint material on the target region are brought into contact with each other, wherein in the alignment in the surface direction before the contact, the control unit shifts a relative position between the mold and the target region based on a shift amount of the pattern of the mold from the target region in the surface direction in the driving which causes the contact, so that the relative position after the contact is set within an allowable range.