The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2018
Filed:
Sep. 26, 2016
Applicant:
Xerox Corporation, Norwalk, CT (US);
Inventors:
Christopher D. Atwood, Rochester, NY (US);
Mark A. Adiletta, Fairport, NY (US);
Ali R. Dergham, Fairport, NY (US);
Roger G. Leighton, Hilton, NY (US);
Francisco Zirilli, Fairport, NY (US);
Assignee:
Xerox Corporation, Norwalk, CT (US);
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); G02B 26/08 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0833 (2013.01); B81B 7/0019 (2013.01); B81C 1/00333 (2013.01); G03F 7/70891 (2013.01); B81B 2201/042 (2013.01);
Abstract
A DMD cooling apparatus and method includes a DMD chip configured on a substrate, and a heatsink located within and integrated into the substrate upon which the DMD is configured. A plurality of micro-channels can be formed on a backside of the substrate. The micro-channels are fabricated via microlithography in association with a fabrication of the DMD chip such that the heatsink integrated into the silicon substrate allows for direct heat removal from the substrate.