The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 15, 2018

Filed:

Apr. 06, 2015
Applicant:

The United States of America As Represented BY the Administrator of the National Aeronautics and Space Administration, Washington, DC (US);

Inventors:

Jennifer Xu, Westlake, OH (US);

Gary W. Hunter, Oberlin, OH (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/00 (2006.01); G01N 33/00 (2006.01); H01L 29/16 (2006.01); H01L 29/872 (2006.01); H01L 29/66 (2006.01); H01L 29/47 (2006.01); H01L 21/04 (2006.01); G01N 33/22 (2006.01); G01N 27/02 (2006.01); G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
G01N 33/0036 (2013.01); G01N 27/02 (2013.01); G01N 27/129 (2013.01); G01N 33/0047 (2013.01); G01N 33/225 (2013.01); H01L 21/0495 (2013.01); H01L 29/1608 (2013.01); H01L 29/47 (2013.01); H01L 29/6606 (2013.01); H01L 29/66143 (2013.01); H01L 29/872 (2013.01);
Abstract

Systems, methods, and other embodiments associated with gas detecting sensors. According to one embodiment, a gas sensor includes a metal layer, a barrier interlayer, a substrate layer, a first insulating layer, a conduction path, a contact pad, and a second insulating layer. The conduction path connects the metal layer to the contact pad. The second insulating layer prevents diffusion through the contact pad, the conduction path, or the metal layer. The sensor includes a wire bonded electrical connection to the contact pad such that voltage can be determined and/or applied.


Find Patent Forward Citations

Loading…