The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2018
Filed:
Nov. 25, 2015
Horiba Stec, Co., Ltd., Kyoto-shi, Kyoto, JP;
Masakazu Minami, Kyoto, JP;
HORIBA STEC, CO., LTD., Kyoto-shi, Kyoto, JP;
Abstract
Provided is a decomposition detecting unit that despite a simple configuration, can detect whether or not decomposition occurs in material gas resulting from the vaporization of a semiconductor material. The decomposition detecting unit includes: an NDIR type or laser absorption spectroscopy type absorbance measuring mechanism that measures first absorbance, which is absorbance at a wavelength at which a semiconductor material absorbs light, and second absorbance, which is absorbance at a wavelength at which a material produced when the semiconductor material decomposes absorbs light, of mixed gas containing material gas resulting from the vaporization of the semiconductor material; and a decomposition detection part that detects the decomposition in the material gas on the basis of the ratio between first concentration calculated on the basis of the first absorbance and the second absorbance and second concentration calculated on the basis of the second absorbance.