The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 15, 2018

Filed:

Dec. 16, 2016
Applicant:

Yokogawa Electric Corporation, Tokyo, JP;

Inventors:

Kodai Murayama, Tokyo, JP;

Tomohito Nohno, Tokyo, JP;

Toyoaki Hamaguchi, Tokyo, JP;

Soukichi Funazaki, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 4/00 (2006.01); G01N 21/21 (2006.01); G01N 21/88 (2006.01); G01N 33/00 (2006.01); G02B 5/04 (2006.01); G01N 21/47 (2006.01);
U.S. Cl.
CPC ...
G01N 21/21 (2013.01); G01N 21/211 (2013.01); G01N 21/8806 (2013.01); G01N 33/00 (2013.01); G02B 5/04 (2013.01); G01N 2021/4792 (2013.01); G01N 2021/8848 (2013.01); G01N 2033/0096 (2013.01);
Abstract

A polarization inspector for inspecting an inspection target, the polarization inspector having a polarization divider for spatially dividing at least a reflected beam of light from the inspection target by irradiating an illumination beam into divided beams of lights mutually different in polarization direction; one or more optical receivers for receiving the divided beams of lights and generating an image signal based on the divided beams of lights; and a processor for calculating at least one of an elliptical azimuth angle, a polarization degree and a polarization component intensity from the image signal.


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