The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2018
Filed:
Aug. 19, 2013
Scale measuring device, method for generating position information, and device with multi-axis stage
Applicant:
Dmg Mori Seiki Co., Ltd., Nara, JP;
Inventors:
Assignee:
DMG MORI SEIKI CO., LTD., Nara, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01D 5/20 (2006.01); G01D 5/245 (2006.01);
U.S. Cl.
CPC ...
G01D 5/2053 (2013.01); G01D 5/2455 (2013.01);
Abstract
A scale device includes a scale main body having at least two incremental tracks, at least two or more incremental signal detection heads for detecting incremental signals from the incremental tracks, and an operation processing unit that generates, based upon detection outputs by the two or more incremental signal detection heads, relative positional information in a measuring direction of a measuring axis and parallel movement amount information in a direction orthogonal to the measuring direction.