The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2018
Filed:
Dec. 03, 2014
Applicant:
United Technologies Corporation, Hartford, CT (US);
Inventors:
Russell A. Beers, Manchester, CT (US);
Joseph A. DePalma, Feeding Hills, MA (US);
Assignee:
UNITED TECHNOLOGIES CORPORATION, Farmington, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/32 (2006.01); C23C 14/22 (2006.01);
U.S. Cl.
CPC ...
C23C 14/325 (2013.01); C23C 14/225 (2013.01);
Abstract
A moveable evaporation source system may have an insulator disposed above a cathode support member, and a cathode support member disposed beneath the insulator and exerting an upward force on the insulator so that the upward force exerted by the cathode support member urges the insulator toward a down force source. A cathode may be placed between the insulator and the down force source and translated so that material liberated from the cathode may strike different portions of a workpiece as the cathode is translated.