The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2018
Filed:
Nov. 18, 2015
Applicant:
Nippon Yttrium Co., Ltd., Omuta-shi, Fukuoka, JP;
Inventors:
Toyohiko Yano, Tokyo, JP;
Katsumi Yoshida, Tokyo, JP;
Toru Tsunoura, Tokyo, JP;
Yuji Shigeyoshi, Omuta, JP;
Assignee:
NIPPON YITRIUM CO., LTD., Omuta-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/50 (2006.01); C04B 35/645 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C04B 35/50 (2013.01); C04B 35/645 (2013.01); H01J 37/32495 (2013.01); C04B 2235/445 (2013.01); C04B 2235/5436 (2013.01); C04B 2235/604 (2013.01); C04B 2235/656 (2013.01); C04B 2235/9692 (2013.01); H01J 2237/334 (2013.01); H01L 21/67069 (2013.01);
Abstract
A sintered body of the present invention contains yttrium oxyfluoride. The yttrium oxyfluoride is preferably YOF and/or YOF. The sintered body of the present invention preferably contains 50% by mass or more of yttrium oxyfluoride. The sintered body of the present invention has a relative density of preferably 70% or more and an open porosity of preferably 10% or less. Furthermore, the sintered body of the present invention has a three-point bending strength of preferably 10 MPa or more and 300 MPa or less.