The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 08, 2018

Filed:

Apr. 24, 2017
Applicant:

Fujitsu Limited, Kawasaki-shi, Kanagawa, JP;

Inventor:

Junichi Yamaguchi, Tsukuba, JP;

Assignee:

FUJITSU LIMITED, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/786 (2006.01); H01L 29/16 (2006.01); H01L 21/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78606 (2013.01); H01L 21/02527 (2013.01); H01L 21/02636 (2013.01); H01L 21/7806 (2013.01); H01L 29/1606 (2013.01); H01L 29/78696 (2013.01);
Abstract

A stacked structure includes: an insulating substrate; a graphene film that is formed on the insulating substrate; and a protective film that is formed on the graphene film and is made of a transition metal oxide, which is, for example, CrO. Thereby, at the time of transfer of the graphene, polymeric materials such as a resist are prevented from directly coming into contact with the graphene and nonessential carrier doping on the graphene caused by a polymeric residue of the resist is suppressed.


Find Patent Forward Citations

Yamaguchi, Junichi. (2018). Electronic device, stacked structure, and manufacturing method of the same (U.S. Patent No. 9966472). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9966472

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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