The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2018
Filed:
Sep. 19, 2014
Applicant:
Hitachit Kokusai Electric Inc., Tokyo, JP;
Inventors:
Daigi Kamimura, Toyama, JP;
Shigeru Odake, Toyama, JP;
Tomoshi Taniyama, Toyama, JP;
Takashi Nogami, Toyama, JP;
Osamu Morita, Toyama, JP;
Yasuaki Komae, Toyama, JP;
Assignee:
Hitachi Kokusai Electric Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B65G 1/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67769 (2013.01); B65G 1/026 (2013.01);
Abstract
An apparatus and method capable of reducing the footprint of substrate processing system. An apparatus includes a housing chamber including a housing cabinet which houses housing containers for housing substrates, and a housing container carrying mechanism provided on the ceiling of the housing chamber and configured to carry the housing containers.