The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 08, 2018

Filed:

Aug. 09, 2016
Applicant:

Apple Inc., Cupertino, CA (US);

Inventors:

Clayton Ka Tsun Chan, Fremont, CA (US);

Ion Bita, Santa Clara, CA (US);

Ranjith Samuel E. John, Fremont, CA (US);

Alfred F. Renaldo, San Jose, CA (US);

Jie Fu, San Jose, CA (US);

Sudirukkuge T. Jinasundera, San Jose, CA (US);

An-Chun Tien, San Jose, CA (US);

Assignee:

APPLE INC., Cupertino, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 38/10 (2006.01); H01L 21/033 (2006.01); H01L 29/861 (2006.01); H01L 29/66 (2006.01); H01L 21/683 (2006.01); H01L 21/268 (2006.01); B29C 71/04 (2006.01); B29D 11/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0331 (2013.01); B29C 71/04 (2013.01); B29D 11/0073 (2013.01); H01L 21/268 (2013.01); H01L 21/6835 (2013.01); H01L 29/66136 (2013.01); H01L 29/861 (2013.01); H01L 2221/6835 (2013.01); H01L 2221/68381 (2013.01);
Abstract

Laser lift-off methods are described in which optical flatness is provided on the back side of a temporary substrate using either an optical layer or optical liquid. A laser is directed through the optical layer or optical liquid and a back side of the temporary substrate to decompose a portion of a process layer supported on a front side of the temporary substrate, followed by separation of the process layer and the temporary substrate.


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