The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 08, 2018

Filed:

Jun. 25, 2015
Applicant:

Gatan, Inc., Warrendale, PA (US);

Inventors:

Alexander Jozef Gubbens, Palo Alto, CA (US);

Colin Trevor, Pleasanton, CA (US);

Ray Dudley Twesten, Livermore, CA (US);

Melanie Barfels, Concord, CA (US);

Assignee:

GATAN, INC., Warrendale, PA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K 1/08 (2006.01); H01J 37/05 (2006.01); H01J 37/12 (2006.01); H01J 37/147 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/05 (2013.01); H01J 37/12 (2013.01); H01J 37/147 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/053 (2013.01); H01J 2237/12 (2013.01); H01J 2237/24485 (2013.01); H01J 2237/2802 (2013.01);
Abstract

An electron energy loss spectrometer for electron microscopy is disclosed having an electrically isolated drift tube extending through the bending magnet and through subsequent optics that focus and magnify the spectrum. An electrostatic or magnetic lens is located either before or after or both before and after the drift tube and the lens or lenses are adjusted as a function of the bending magnet drift tube voltage to maintain a constant net focal length and to avoid defocusing. An energy selecting slit is included in certain embodiments to cleanly cut off electrons dispersed outside the energy range incident on the detector, thereby eliminating artifacts caused by unwanted electrons scattering back into the spectrum.


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