The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 08, 2018

Filed:

Oct. 09, 2015
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Markus Widenmeyer, Schoenaich, DE;

Andreas Letsch, Stuttgart, DE;

Denis Kunz, Untergruppenbach, DE;

Robert Roelver, Calw-Stammheim, DE;

Assignee:

Robert Bosch GmbH, Stuttgart, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/407 (2006.01); G01N 27/417 (2006.01); G01N 27/18 (2006.01); G01N 1/22 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/407 (2013.01); G01N 1/22 (2013.01); G01N 27/18 (2013.01); G01N 27/417 (2013.01); G01N 27/4175 (2013.01); G01N 33/0027 (2013.01);
Abstract

A method for producing a gas sensor device for detecting a gaseous analyte includes providing a sensor body comprising a semiconductor substrate, in which a cavity section is shaped, and a solid electrolyte layer arranged at a surface of the substrate. The electrolyte layer is not covered by the substrate in the cavity section. The method includes producing a signal conductor layer deposited dry-chemically at a substrate side of the sensor body, such that, in the region of the electrolyte layer not covered by the substrate in the cavity section, a cutout section is shaped in the signal conductor layer, in which the signal conductor layer is removed or not deposited. The method includes applying measuring electrodes to the electrolyte layer by a wet-chemical process. One measuring electrode is arranged in the cutout section and one measuring electrode is arranged on an electrolyte layer side of the sensor body.


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