The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2018
Filed:
May. 12, 2016
Applicant:
Continental Automotive Systems, Inc., Auburn Hills, MI (US);
Inventors:
Jen-Huang Albert Chiou, Libertyville, IL (US);
Shiuh-Hui Steven Chen, Lake Zurich, IL (US);
Assignee:
Continental Automotive Systems, Inc., Auburn Hills, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); G01L 9/02 (2006.01); G01L 9/08 (2006.01); G01L 19/04 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0055 (2013.01);
Abstract
The voltage output span and sensitivity from a MEMS pressure sensor are increased and pressure nonlinearity is reduced by thinning a diaphragm and forming the diaphragm to include anchors that are not connected to or joined to diaphragm-stiffening beams or thickened regions of the diaphragm.