The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 08, 2018

Filed:

Feb. 27, 2014
Applicant:

Pfeiffer Vacuum Gmbh, Asslar, DE;

Inventor:

Michael Schill, Asslar-Bechlingen, DE;

Assignee:

PFEIFFER VACUUM GMBH, Asslar, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04D 29/58 (2006.01); F04D 19/04 (2006.01);
U.S. Cl.
CPC ...
F04D 29/584 (2013.01); F04D 19/042 (2013.01);
Abstract

A vacuum pump, in particular to a turbomolecular pump, has a pump inlet, a pump outlet and a pump space for a gas to be pumped arranged between the pump inlet and the pump outlet, and at least one cooling gas inlet for a cooling gas for cooling the vacuum pump, the pump further having one or more hollow regions for the cooling gas connected in a gas conducting manner to the cooling gas inlet and arranged outside the pump space, wherein the or each hollow region is bounded by at least one component of the vacuum pump to be cooled.


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