The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Oct. 23, 2014
Applicant:
The Trustees of Columbia University IN the City of New York, New York, NY (US);
Inventors:
Assignee:
The Trustees of Columbia University in the City of New York, New York, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03B 5/32 (2006.01); H03B 5/30 (2006.01); H01L 21/02 (2006.01); H03H 3/02 (2006.01); H03H 9/17 (2006.01); H01L 29/84 (2006.01); H01L 29/06 (2006.01); H01L 29/165 (2006.01); H03H 9/02 (2006.01); H01L 29/00 (2006.01); G01J 5/04 (2006.01); G01J 5/44 (2006.01); H01L 41/18 (2006.01);
U.S. Cl.
CPC ...
H03B 5/30 (2013.01); G01J 5/046 (2013.01); G01J 5/44 (2013.01); H01L 21/0262 (2013.01); H01L 29/00 (2013.01); H01L 29/0673 (2013.01); H01L 29/165 (2013.01); H01L 29/84 (2013.01); H01L 41/18 (2013.01); H03H 3/02 (2013.01); H03H 9/02244 (2013.01); H03H 9/02433 (2013.01); H03H 9/17 (2013.01); H03B 2200/0022 (2013.01); H03B 2200/0048 (2013.01); H03B 2201/0266 (2013.01);
Abstract
A nano-electro-mechanical systems (NEMS) oscillator can include an insulating substrate, a source electrode and a drain electrode, a metal local gate electrode, and a micron-sized, atomically thin graphene resonator. The source electrode and drain electrode can be disposed on the insulating substrate. The metal local gate electrode can be disposed on the insulating substrate. The graphene resonator can be suspended over the metal local gate electrode and define a vacuum gap between the graphene resonator and the metal local gate electrode.