The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 01, 2018

Filed:

Jan. 19, 2015
Applicant:

Hitachi, Ltd., Chiyoda-ku, Tokyo, JP;

Inventors:

Naoki Tega, Tokyo, JP;

Naoki Watanabe, Tokyo, JP;

Shintaroh Sato, Tokyo, JP;

Assignee:

HITACHI, LTD., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/15 (2006.01); H01L 31/0312 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 21/8258 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66893 (2013.01); H01L 21/8258 (2013.01); H01L 29/66045 (2013.01); H01L 29/66734 (2013.01); H01L 29/7825 (2013.01);
Abstract

An object of the present invention is to provide high-performance highly-reliable power semiconductor device. The semiconductor device according to the present invention is provided with a semiconductor substrate of a first conductive type, a drain electrode formed on a back side of the semiconductor substrate, a drift layer of the first conductive type formed on a semiconductor substrate, a source area of the first conductive type, a current-diffused layer of the first conductive type electrically connected to the drift layer, a body layer of a second conductive type reverse to the first conductive type in contact with the source area and the current-diffused layer, a trench which pierces the source area, the body layer and the current-diffused layer, which is shallower than the body layer, and the bottom of which is in contact with the body layer, a gate insulating film formed on an inner wall of the trench, a gate electrode formed on the gate insulating film, and a gate insulating film protective layer formed between the current-diffused layer and the gate electrode.


Find Patent Forward Citations

Loading…