The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 01, 2018

Filed:

Oct. 13, 2016
Applicant:

Jtekt Corporation, Osaka-shi, JP;

Inventors:

Takaya Nagahama, Obu, JP;

Koichi Shiiba, Nisshin, JP;

Yoshinori Imoto, Kariya, JP;

Assignee:

JTEKT CORPORATION, Osaka-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 23/00 (2006.01); H01L 21/48 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 24/85 (2013.01); H01L 21/4885 (2013.01); H01L 21/67115 (2013.01); H01L 22/10 (2013.01); H01L 2224/485 (2013.01); H01L 2924/01029 (2013.01);
Abstract

A heating method includes an oxide film forming step and a heating step. The thickness of an oxide film is set in a first range that includes a first maximal thickness and a second maximal thickness and that is smaller than a second minimal thickness in the relationship with the laser absorption having a periodic profile. The first maximal thickness corresponds to a first maximal value a of the laser absorption. The second maximal thickness corresponds to a second maximal value of the laser absorption. The second minimal thickness corresponds to a second minimal value of the laser absorption, namely the minimal value of the laser absorption that appears between the second maximal value and a third maximal value, or the maximal value of the laser absorption that appears subsequent to the second maximal value.


Find Patent Forward Citations

Loading…