The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Jan. 21, 2014
Plasmart Inc., Daejeon, KR;
Yong-Gwan Lee, Daejeon, KR;
Jae-Hyun Kim, Daejeon, KR;
Sang-Won Lee, Daejeon, KR;
Sae-Hoon Uhm, Hwaseong-si, KR;
Young-Rok Kim, Daejeon, KR;
Kyu-Hun Lee, Daejeon, KR;
Jin-Joong Kim, Seoul, KR;
Plasmart Inc., Daejeon, KR;
Abstract
Provided are a plasma generation apparatus and a plasma generation method. The plasma generation apparatus includes a chamber including a dielectric window and a toroidal discharge space, a magnetic core disposed to surround a portion of the chamber, an induction coil disposed to wind the magnetic core, and a waveguide radiating a microwave through the dielectric window. Alternating current flowing in the induction coil forms a magnetic flux at the magnetic core, and the magnetic flux generates inductively-coupled plasma. A microwave propagating along the waveguide generates microwave plasma inside the chamber.