The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Aug. 08, 2013
Applicant:
Massachusetts Institute of Technology, Cambridge, MA (US);
Inventor:
Luis Fernando Velásquez-García, Newton, MA (US);
Assignee:
Massachusetts Institute of Technology, Cambridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 17/04 (2012.01); H01J 11/18 (2012.01); H01J 17/20 (2012.01); H05H 1/48 (2006.01);
U.S. Cl.
CPC ...
H01J 17/04 (2013.01); H01J 11/18 (2013.01); H01J 17/20 (2013.01); H05H 2001/481 (2013.01);
Abstract
Microplasma generators and associated arrays and methods are described herein. Certain embodiments relate to a microplasma generator in which an elongated semiconductor structure can control electronic current supplied to a microplasma cavity. In certain cases, the microplasma generator can be configured to generate a microplasma when a voltage is applied across the elongated semiconductor structure. Some embodiments include particular spatial arrangements between the electrode(s), the elongated semiconductor structure, and/or the microplasma cavity.