The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Aug. 13, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Bruce E. Adams, Portland, OR (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/06 (2014.01); G02F 1/01 (2006.01); G02F 1/19 (2006.01); B23K 26/00 (2014.01); B23K 26/08 (2014.01); B23K 26/0622 (2014.01); B23K 101/40 (2006.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
G02F 1/0147 (2013.01); B23K 26/0006 (2013.01); B23K 26/0066 (2013.01); B23K 26/0622 (2015.10); B23K 26/0648 (2013.01); B23K 26/0853 (2013.01); G02F 1/19 (2013.01); B23K 2201/40 (2013.01); B23K 2203/56 (2015.10); G02F 2201/08 (2013.01); G02F 2201/346 (2013.01);
Abstract
Embodiments of the present invention generally relate to an optical valve that modifies a laser beam to allow more energy to be irradiated onto less absorbing areas on a substrate and less energy to be irradiated onto more absorbing areas on the substrate, thus creating a more uniform heating field. The optical valve is a layered structure comprising a reflective switch layer, an absorbing layer, a thermal resistor and a thermal bath.