The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Aug. 04, 2016
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventor:
Yasushi Mizoguchi, Suwa, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 26/10 (2006.01); G02B 27/01 (2006.01); B81B 3/00 (2006.01); G02B 27/10 (2006.01);
U.S. Cl.
CPC ...
G02B 26/101 (2013.01); B81B 3/00 (2013.01); G02B 27/0149 (2013.01); G02B 27/0176 (2013.01); G02B 27/104 (2013.01); G02B 2027/0178 (2013.01);
Abstract
An optical scanner includes a first Si layer, a second Si layer, and an SiOlayer present between the Si layers. The optical scanner includes a movable section and shaft sections formed from the first Si layer, a holding section formed from the second Si layer and disposed to be separated from the movable section, a coupling section formed from the SiOlayer and configured to couple the movable section and the holding section, and a light reflecting section provided on the upper surface of the holding section and configured to reflect light. The movable section and the coupling section are joined by direct joining.