The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Mar. 30, 2016
Invensense, Inc., San Jose, CA (US);
Johannes Schumm, Zurich, CH;
Andreas Reinhard, Dubendorf, CH;
Thomas Kraehenbuehl, Zurich, CH;
Stefan Thiele, Jona, CH;
Rene Hummel, Baar, CH;
Chung-Hsien Lin, Hsinchu, TW;
Wang Shen Su, Tainan, TW;
Tsung Lin Tang, Kaohsiung, TW;
Chia Min Lin, Hsinchu County, TW;
INVENSENSE, INC., San Jose, CA (US);
Abstract
A pressure sensor comprises a deformable membrane deflecting in response to pressure applied, a first stationary electrode, and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied. At least one of the first and the second electrode comprises a getter material for collecting gas molecules.