The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 01, 2018

Filed:

Mar. 31, 2016
Applicant:

Reno Technologies, Inc., Wilmington, DE (US);

Inventors:

Daniel T. Mudd, Reno, NV (US);

Patti J. Mudd, Reno, NV (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 31/02 (2006.01); G01F 1/36 (2006.01); F16K 37/00 (2006.01); F16K 47/08 (2006.01); F16K 27/00 (2006.01); G01F 1/88 (2006.01); G01F 15/00 (2006.01); G05D 7/06 (2006.01);
U.S. Cl.
CPC ...
G01F 1/36 (2013.01); F16K 27/003 (2013.01); F16K 37/005 (2013.01); F16K 47/08 (2013.01); G01F 1/88 (2013.01); G01F 15/002 (2013.01); G01F 15/005 (2013.01); G05D 7/0635 (2013.01);
Abstract

In one embodiment, a control apparatus for delivery of a process gas includes an inlet conduit; a valve operably coupled to the inlet conduit and alterable between an open condition and a closed condition, the valve having a first conductance and being downstream of the inlet conduit; a characterized restrictor operably coupled to the valve, the characterized restrictor having a second conductance and being downstream of the valve; and an outlet conduit operably coupled to the characterized restrictor and being downstream of the characterized restrictor; wherein a ratio of the first conductance to the second conductance is 10:1 or higher.


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