The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
May. 26, 2015
Applicant:
Up Chemical Co., Ltd., Pyeongtaek-si, KR;
Inventors:
Assignee:
UP Chemical Co., Ltd., Pyeongtaek-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 15/00 (2006.01); C23C 16/455 (2006.01); C09D 1/00 (2006.01); C23C 16/06 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45525 (2013.01); C07F 15/0046 (2013.01); C09D 1/00 (2013.01); C23C 16/06 (2013.01);
Abstract
The present disclosure relates to a novel ruthenium compound, a method for preparing the ruthenium compound, a precursor composition for depositing a ruthenium-containing film including the ruthenium compound, and a method for depositing a ruthenium-containing film by using the precursor composition.