The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 01, 2018

Filed:

Jul. 12, 2017
Applicant:

Toyota Jidosha Kabushiki Kaisha, Toyota-shi, JP;

Inventors:

Kazutaka Tachibana, Nagoya, JP;

Takayasu Sato, Takahama, JP;

Yoji Sato, Kasugai, JP;

Hiromichi Nakata, Toyota, JP;

Daiki Tsuboi, Nishikasugai, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/46 (2006.01); C23C 16/27 (2006.01); C23C 16/511 (2006.01); C23C 16/458 (2006.01); H01L 21/205 (2006.01);
U.S. Cl.
CPC ...
C23C 16/274 (2013.01); C23C 16/4581 (2013.01); C23C 16/511 (2013.01); H01L 21/205 (2013.01); H05H 1/46 (2013.01); H05H 2001/4607 (2013.01);
Abstract

A high-frequency wave supplying structure includes a center conductor that extends in a specified direction, an outer conductor that is coaxial with the center conductor and grounded, and a cylindrical insulating member that is provided between the center conductor and the outer conductor. The distal end of the center conductor is a support portion that supports a workpiece W. A shield member is provided outward of the outer conductor to be coaxial with the outer conductor and the center conductor. The distal end of the shield member is located closer to the support portion in the specified direction than the distal end of the outer conductor. The insulating member includes a protruding portion that protrudes toward the support portion from an opening of the outer conductor. The protruding portion is opposed to the distal end of the outer conductor in the specified direction.


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