The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Feb. 13, 2012
Applicants:
Clive Luca Widdicks, Bristol, GB;
Ian Moncrieff, Wickwar, GB;
Inventors:
Clive Luca Widdicks, Bristol, GB;
Ian Moncrieff, Wickwar, GB;
Assignee:
SPTS TECHNOLOGIES LIMITED, Newport, Gwent, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
C23C 14/564 (2013.01); H01J 37/3411 (2013.01);
Abstract
A composite shield assembly is for use in deposition apparatus defining a work piece location. The assembly includes a first shield element for position circumjacent the work piece location and a second shield element for extending around and carrying the first element. The thermal conductivity of the first element is greater than that of the second element, and the elements are arranged for intimate thermal contact.