The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 01, 2018

Filed:

Jun. 10, 2010
Applicants:

Ralph Teunissen, Deventer, NL;

Gerhard Span, Wattens, AT;

Inventors:

Ralph Teunissen, Deventer, NL;

Gerhard Span, Wattens, AT;

Assignee:

MAHLE INTERNATIONAL GMBH, Stuttgart, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01J 37/34 (2006.01); C23C 14/06 (2006.01); H01L 35/16 (2006.01); H01L 35/22 (2006.01); H01L 35/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); C23C 14/0623 (2013.01); C23C 14/0682 (2013.01); H01J 37/3426 (2013.01); H01L 35/16 (2013.01); H01L 35/22 (2013.01); H01L 35/34 (2013.01);
Abstract

The invention relates to a method for producing thermoelectric layers by depositing thermoelectric material on a substrate by means of sputter deposition. In order to create a method for producing thermoelectric layers that are better suited for use in thermogenerators, and in particular have higher Seebeck coefficients, the production of a target made of thermoelectric material is proposed by mixing at least two powdered starting materials having a particle size from 0.01 μm-5000 μm, while coupling in energy and depositing the thermoelectric material from the target on the substrate by way of magnetron sputter deposition.


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