The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Mar. 27, 2017
Applicant:
Evigia Systems, Inc., Ann Arbor, MI (US);
Inventors:
Weibin Zhu, Saline, MI (US);
Navid Yazdi, Ann Arbor, MI (US);
Assignee:
Other;
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/058 (2006.01); H01L 21/76 (2006.01); H01L 21/302 (2006.01); H01L 21/461 (2006.01); B81C 1/00 (2006.01); H01L 27/12 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/0069 (2013.01); B81B 7/0019 (2013.01); H01L 27/1207 (2013.01); B81B 2201/0228 (2013.01); B81B 2201/0278 (2013.01); B81B 2207/07 (2013.01); B81B 2207/99 (2013.01); B81C 2201/0126 (2013.01); B81C 2201/0132 (2013.01);
Abstract
The present invention generally relates to an ovenized platform and a fabrication process thereof. Specifically, the invention relates to an ovenized hybrid Si/SiOplatform compatible with typical CMOS and MEMS fabrication processes and methods of its manufacture. Embodiments of the invention may include support arms, CMOS circuitry, temperature sensors, IMUs, and/or heaters among other elements.