The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Dec. 11, 2015
Applicant:
Tokai Carbon Korea Co., Ltd, Gyeonggi-do, KR;
Inventor:
Joung Il Kim, Gyeonggi-do, KR;
Assignee:
Tokai Carbon Korea Co., LTD, Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 7/00 (2006.01); C23C 16/32 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
B05D 7/50 (2013.01); C23C 16/325 (2013.01); C23C 16/4404 (2013.01); C23C 16/4405 (2013.01);
Abstract
A method of repairing a semiconductor processing component is provided, in which the method includes preparing a semiconductor processing component including a tantalum carbide (TaC) coating layer on which a silicon carbide (SiC)-deposited layer is formed, and performing a thermal process on the semiconductor processing component at a temperature of 1,700° C. to 2,700° C. under a gaseous condition using at least one gas selected from the group consisting of a gas including hydrogen, a gas including chlorine, and an inert gas, or under a vacuum condition.