The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 24, 2018

Filed:

Dec. 20, 2013
Applicant:

Analog Devices, Inc., Norwood, MA (US);

Inventors:

Florian Thalmayr, Unterhaching, DE;

Andrew Sparks, Cambridge, MA (US);

Jan H. Kuypers, Rehau, DE;

Assignee:

Analog Devices, Inc., Norwood, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03B 5/30 (2006.01); H03H 9/02 (2006.01); H03H 9/15 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02338 (2013.01); H03B 5/30 (2013.01); H03H 9/02228 (2013.01); H03H 2009/155 (2013.01);
Abstract

Methods and apparatus for anchoring resonators, such as microelectromechanical systems (MEMS) resonators. A resonator may include a substrate, a mechanical resonating structure, and at least one anchor. The mechanical resonating structure may be configured to resonate in a resonance mode of vibration at a frequency. The anchor may couple the mechanical resonating structure to the substrate. The anchor may be configured to exhibit an acoustic bandgap at the frequency of the resonance mode of vibration of the mechanical resonating structure. The anchor may be oriented in a direction substantially parallel to a direction of propagation of the resonance mode of vibration of the mechanical resonating structure.


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