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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9954137 B1

PDFFull Text
Expired
Date of Patent:
Apr. 24, 2018

Filed:

May. 15, 2017

Photodetector and methods of manufacture

Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

John J. Ellis-Monaghan, Grand Isle, VT (US);

John C. S. Hall, Williston, CT (US);

Marwan H. Khater, Astoria, NY (US);

Edward W. Kiewra, South Burlington, VT (US);

Steven M. Shank, Jericho, VT (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:

Michael LeStrange

Andrew M. Calderon

Roberts Mlotkowski Safran Cole & Calderon, P.C.

Primary Examiner:

David S Blum

Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 31/20 (2006.01); H01L 27/146 (2006.01); H01L 31/028 (2006.01); H01L 31/0203 (2014.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 31/202 (2013.01); H01L 21/02667 (2013.01); H01L 27/14643 (2013.01); H01L 27/14687 (2013.01); H01L 27/14689 (2013.01); H01L 27/14692 (2013.01); H01L 27/14698 (2013.01); H01L 31/0203 (2013.01); H01L 31/028 (2013.01); H01L 31/208 (2013.01);
Abstract

Photodetector structures and methods of manufacture are provided. The method includes forming undercuts about detector material formed on a substrate. The method further includes encapsulating the detector to form airgaps from the undercuts. The method further includes annealing the detector material causing expansion of the detector material into the airgaps.

Find Patent Forward Citations

Ellis-Monaghan, John. (2018). Photodetector and methods of manufacture (U.S. Patent No. 9954137). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9954137

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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