The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 24, 2018

Filed:

Aug. 16, 2017
Applicant:

Ams Ag, Unterpremstaetten, AT;

Inventor:

Martin Knaipp, Unterpremstaetten, AT;

Assignee:

AMS AG, Unterpremstaetten, AT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01); H01L 29/808 (2006.01); H01L 29/10 (2006.01); H01L 21/266 (2006.01); H01L 29/06 (2006.01); H01L 21/225 (2006.01); H01L 29/40 (2006.01); H01L 29/08 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/808 (2013.01); H01L 21/2253 (2013.01); H01L 21/266 (2013.01); H01L 29/063 (2013.01); H01L 29/0692 (2013.01); H01L 29/0843 (2013.01); H01L 29/1066 (2013.01); H01L 29/1095 (2013.01); H01L 29/404 (2013.01); H01L 29/66901 (2013.01);
Abstract

The method comprises implanting a deep well of a first type of electrical conductivity provided for a drift region in a substrate of semiconductor material, the deep well of the first type comprising a periphery, implanting a deep well or a plurality of deep wells of a second type of electrical conductivity opposite to the first type of electrical conductivity at the periphery of the deep well of the first type, implanting shallow wells of the first type of electrical conductivity at the periphery of the deep well of the first type, the shallow wells of the first type extending into the deep well of the first type; and implanting shallow wells of the second type of electrical conductivity adjacent to the deep well of the first type between the shallow wells of the first type of electrical conductivity.


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