The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2018
Filed:
Aug. 06, 2015
Canon Kabushiki Kaisha, Tokyo, JP;
Takahiro Matsumoto, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An imprint apparatus includes: a heating unit configured to heat an imprint region where an imprint process on a substrate is performed and change a shape of the imprint region. The heating unit includes a first optical system configured to emit a light beam extending in a first direction and a second direction perpendicular to an optical axis, a changing unit configured to change a ratio of widths of the light beam emitted from the first optical system in the first direction and the second direction, and an intensity distribution adjusting unit configured to adjust an intensity distribution of the light beam the ratio of which has been changed, and the heating unit heats the imprint region by irradiating the imprint region with the light beam from the intensity distribution adjusting unit.