The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 24, 2018

Filed:

May. 15, 2015
Applicant:

Invensense, Inc., San Jose, CA (US);

Inventors:

Matthew Julian Thompson, Beaverton, OR (US);

Kirt Reed Williams, Portola Valley, CA (US);

Assignee:

InvenSense, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); B81B 7/00 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); B81B 7/0016 (2013.01); B81B 2203/0307 (2013.01); G01P 2015/0831 (2013.01);
Abstract

A system and method for reducing offset in a MEMS sensor are disclosed. In a first aspect, the system is a MEMS sensor that comprises a sensing reference plane, at least one anchor coupled to the sensing reference plane, at least one proof mass coupled to the at least one anchor, wherein one of the at least one proof mass moves under an external excitation, a pattern of sensing elements coupled between the sensing reference plane and the at least one proof mass to detect motion normal to the sensing reference plane, wherein the pattern of sensing elements shares at least three axes of polarity anti-symmetry, and a signal processing circuit to combine the pattern of sensing elements thereby providing an output proportional to the external excitation. In a second aspect, the sensing reference plane is divided by two axes forming four quadrants on the sensing reference plane.


Find Patent Forward Citations

Thompson, Matthew. (2018). Offset rejection electrodes (U.S. Patent No. 9952252). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9952252

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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