The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 24, 2018

Filed:

Feb. 23, 2016
Applicant:

Waters Technologies Corporation, Milford, MA (US);

Inventors:

Bernard Bunner, Newton, MA (US);

Geoff C. Gerhardt, Millbury, MA (US);

Theodore A. Dourdeville, Providence, RI (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01L 13/02 (2006.01); G01N 30/32 (2006.01); B01L 3/00 (2006.01); G01N 30/34 (2006.01); G01N 30/00 (2006.01); G01L 15/00 (2006.01); G01L 19/00 (2006.01); G05D 7/06 (2006.01); G01N 30/36 (2006.01); G01L 9/00 (2006.01); B01D 15/16 (2006.01);
U.S. Cl.
CPC ...
G01N 30/32 (2013.01); B01L 3/502746 (2013.01); G01L 9/0026 (2013.01); G01L 9/0042 (2013.01); G01L 15/00 (2013.01); G01L 19/0023 (2013.01); G01N 30/00 (2013.01); G01N 30/34 (2013.01); G01N 30/36 (2013.01); G05D 7/0676 (2013.01); B01D 15/163 (2013.01); B01L 2200/0605 (2013.01); B01L 2200/146 (2013.01); B01L 2300/0663 (2013.01); B01L 2300/0867 (2013.01); B01L 2300/0883 (2013.01); B01L 2300/14 (2013.01); B01L 2400/0487 (2013.01); B01L 2400/082 (2013.01); B01L 2400/086 (2013.01); G01L 9/0055 (2013.01); G01N 2030/326 (2013.01); Y10T 137/7762 (2015.04);
Abstract

Flow through pressure sensors for use in fluid chromatography systems include a planar device formed from diffusion bonding of a plurality of metallic sheets and at least one sensing element. The planar device has a top surface, a bottom surface and a flow through channel. A diaphragm formed from a portion of one of the top or bottom surfaces is located adjacent to a sensing region of the flow through channel and is attached to the sensing element. The diaphragm is sized to deflect a distance in response to fluid pressure in the sensing region, which has an internal volume of less than about 25 microliters. The diaphragm and attached sensing element form a pressure sensor that measures strain or deflection of the diaphragm to calculate a pressure within the sensing region.


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