The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 24, 2018

Filed:

Mar. 17, 2015
Applicant:

The Regents of the University of Michigan, Ann Arbor, MI (US);

Inventors:

Yogesh Gianchandani, Ann Arbor, MI (US);

Tao Li, Ann Arbor, MI (US);

Yushu Ma, Ann Arbor, MI (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/00 (2006.01); B81B 7/02 (2006.01); B81C 3/00 (2006.01); H01L 23/043 (2006.01); H01L 23/053 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0048 (2013.01); B81B 7/02 (2013.01); B81C 3/004 (2013.01); H01L 23/043 (2013.01); H01L 23/053 (2013.01); B81B 7/0032 (2013.01); B81B 7/0045 (2013.01); B81B 2201/0264 (2013.01); B81C 3/00 (2013.01); B81C 3/002 (2013.01);
Abstract

A sub-millimeter packaged microsystem includes a microsystem located in a sealed cavity defined between first and second portions of a micropackage. One or both micropackage portions can be fabricated from a metal suitable for use in a harsh environment, such as an oil well environment. The microsystem includes electronic components and can be configured to communicate with external components through a wall of the micropackage by wireless communication or by conductive feedthroughs. Pluralities of microsystems, first micropackage portions, and/or second micropackage portions are simultaneously placed during a batch assembly process. The assembly process may include micro-crimping the first and second micropackaging portions together without the need for bonding materials and related process steps.


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