The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 17, 2018

Filed:

Sep. 19, 2016
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Inventors:

Masayuki Kimura, Kanagawa, JP;

Yukiko Tojo, Kanagawa, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/786 (2006.01); H01L 21/477 (2006.01); H01L 29/417 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78693 (2013.01); H01L 21/477 (2013.01); H01L 29/41733 (2013.01); H01L 29/66969 (2013.01);
Abstract

A semiconductor device is manufactured by forming an oxide layer, forming an insulating layer and a sacrificial layer over the oxide layer, forming a conductive layer over the insulating layer and the sacrificial layer, and performing heat treatment after the formation of the conductive layer so that a first mixed layer is formed in a region of the oxide layer that is in contact with the conductive layer and a second mixed layer is formed in a region of the sacrificial layer that is in contact with the conductive layer. The first mixed layer includes at least one of elements included in the conductive layer. The second mixed layer includes at least one of elements included in the conductive layer. The resistance value of the first mixed layer is smaller than that of the oxide layer.


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