logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9947429 B1

PDFFull Text
Expired
Date of Patent:
Apr. 17, 2018

Filed:

Jun. 11, 2014

Ag alloy film for reflecting electrode or wiring electrode, reflecting electrode or wiring electrode, and ag alloy sputtering target

Applicant:

Kobe Steel, Ltd., Kobe-shi, JP;

Inventors:

Yoko Shida, Kobe, JP;

Hiroshi Goto, Kobe, JP;

Mototaka Ochi, Kobe, JP;

Assignee:

Kobe Steel, Ltd., Kobe-shi, JE;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Seth Dumbris

Int. Cl.
CPC ...
B32B 15/04 (2006.01); H01B 1/02 (2006.01); C23C 14/34 (2006.01); C22C 5/06 (2006.01); C22F 1/00 (2006.01); C22F 1/14 (2006.01); H01L 23/532 (2006.01); C23C 14/18 (2006.01); H01J 37/34 (2006.01); H01L 51/52 (2006.01);
U.S. Cl.
CPC ...
H01B 1/02 (2013.01); C22C 5/06 (2013.01); C22F 1/00 (2013.01); C22F 1/14 (2013.01); C23C 14/185 (2013.01); C23C 14/3414 (2013.01); H01J 37/3429 (2013.01); H01L 23/53247 (2013.01); H01L 51/5218 (2013.01); H01L 2924/0002 (2013.01); Y10T 428/12896 (2015.01);
Abstract

An Ag alloy film used for a reflecting electrode or an interconnection electrode, the Ag alloy film exhibiting low electrical resistivity and high reflectivity and having exceptional oxidation resistance under cleaning treatments such as an Oplasma treatment or UV irradiation, wherein the Ag alloy film contains either In in an amount of larger than 2.0 atomic % to 2.7 atomic % or smaller; or Zn in an amount of larger than 2.0 atomic % to 3.5 atomic % or smaller; or both. The Ag alloy film may further contain Bi in an amount of 0.01 to 1.0 atomic %.

Find Patent Forward Citations

Shida, Yoko. (2018). Ag alloy film for reflecting electrode or wiring electrode, reflecting electrode or wiring electrode, and ag alloy sputtering target (U.S. Patent No. 9947429). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9947429

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…