Evaporation coating apparatus

Abstract

An evaporation coating apparatus comprising a heating unit () and a cylindrical member () disposed within the heating unit (), wherein the cylindrical member () comprises a hollow sleeve () and a barrel () disposed at an inner side of the hollow sleeve () in a fitting manner; wherein a top end area of the hollow sleeve () is provided with a first evaporation hole (), and an external surface of the hollow sleeve () is provided with an internal heater strip () connected to a control unit; wherein an external surface of the barrel () is provided with a groove (') extending along an axial central line of the barrel (), the groove (′) is provided with a plurality of compartments () arranged at interval space, and each of the compartments () is provided with a crucible (); wherein the crucible () comprises a main body () which is disposed within the compartment () and sealed all around with one side opened, and a cover () which is connected to the main body () in a fitting manner and provided with a second evaporation hole () corresponding to the first evaporation hole (); and wherein the heating unit () has a hollow columnar structure, and an external surface of the heating unit () is provided with an external heater strip () and a nozzle () which is corresponding to the first evaporation hole (). The evaporation coating apparatus is mainly configured to manufacture large-sized displays and can improve the uniformity of film-forming with organic material on the surface of the substrate.