The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2018
Filed:
Sep. 07, 2016
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Eiju Hirai, Azumino, JP;
Yoichi Naganuma, Matsumoto, JP;
Toshiaki Hamaguchi, Fujimi-machi, JP;
Motoki Takabe, Shiojiri, JP;
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/14 (2006.01); B41J 2/16 (2006.01);
U.S. Cl.
CPC ...
B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/1623 (2013.01); B41J 2/1629 (2013.01); B41J 2/1631 (2013.01); B41J 2/1632 (2013.01); B41J 2/1634 (2013.01); B41J 2/1646 (2013.01); B41J 2002/1425 (2013.01); B41J 2002/14362 (2013.01); B41J 2002/14491 (2013.01); B41J 2202/18 (2013.01);
Abstract
A MEMS device includes a first substrate; a second substrate that is disposed laminated on the first substrate; and a functional element that is disposed between the first substrate and the second substrate, in which the second substrate is smaller than the first substrate, and in planar view, an end portion of the second substrate is disposed inside an end portion of the first substrate.
Quick Actions:
Hirai, Eiju. (2018). Mems device, liquid ejecting head, liquid ejecting apparatus, manufacturing method of mems device, and manufacturing method of liquid ejecting head (U.S. Patent No. 9944077). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9944077
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile