The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2018
Filed:
Feb. 15, 2013
Lg Chem, Ltd., Seoul, KR;
Young Ju Seo, Daejeon, KR;
Chae-Ho Chung, Daejeon, KR;
Do-Ki Chang, Chungbuk, KR;
Ki-Kyo Yeom, Chungbuk, KR;
Ye-Hoon Im, Daejeon, KR;
Jae-Min Kim, Chungbuk, KR;
Kyoung-Hoon Min, Daejeon, KR;
Won-Chan Park, Daejeon, KR;
LG CHEM, LTD., Seoul, KR;
Abstract
A fluid supplying apparatus includes an inner tube having a plurality of holes for distributing a fluid supplied from a supply unit, and an outer tube arranged coaxially or non-coaxially with the inner tube to surround the inner tube and having a plurality of slots for injecting the fluid distributed therein from the holes to the outside. The outer tube substantially has the same length as the inner tube. The fluid supplying apparatus may be used for a thin film cleaning system or method.