The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2018
Filed:
Jul. 01, 2016
Canon Kabushiki Kaisha, Tokyo, JP;
Shingo Kitamura, Chigasaki, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
A method of manufacturing a solid-state image sensor, the method comprising preparing a structure including a substrate and an insulating member provided thereon, the substrate including a photoelectric conversion portion, forming a first opening in the insulating member, the first opening having a bottom face at a position higher than an upper face of the substrate and an inclined first face, forming a first member to fill the first opening, forming a second opening in the first member, forming a third opening, having a second face, in the insulating member by etching part of the insulating member under the second opening using the first member, and forming a second member to fill the third opening, wherein the inclined angle of the first face is smaller than that of the second face.