The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2018
Filed:
Nov. 14, 2016
Samsung Electronics Co., Ltd., Suwon-si, KR;
Jung-Min Oh, Incheon, KR;
HyoSan Lee, Suwon-si, KR;
YongSun Ko, Suwon-si, KR;
KyoungSeob Kim, Suwon-si, KR;
SeokHoon Kim, Seongnam-si, KR;
KunTack Lee, Suwon-si, KR;
YongMyung Jun, Hwaseong-si, KR;
Yong-Jhin Cho, Hwaseong-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Gyoonggi-do, KR;
Abstract
A method of manufacture and fluid supply system for treating a substrate is provided. The fluid supply system for treating a substrate may include a substrate dry part supplying a dry fluid to dry a rinse solution doped on a substrate; a dry fluid separation part retrieving a mixed fluid that the dry fluid and the rinse solution are mixed with each other during a dry process of the substrate from the substrate dry part and separating the dry fluid from the mixed fluid; and a dry fluid supply part resupplying the dry fluid separated from the dry fluid separation part to the substrate dry part.