The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 10, 2018

Filed:

Sep. 03, 2015
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Makoto Furuhata, Matsumoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5747 (2012.01); G01C 19/574 (2012.01);
U.S. Cl.
CPC ...
G01C 19/574 (2013.01);
Abstract

A physical quantity sensor element is provided with a detecting portion, a driving portion, a beam portion which connects a detecting portion and the driving portion to each other, and in which the beam portion includes a branched portion. The beam portion includes two mass portion side beam portions which extend from two position of the driving portion, which are different from each other, and two supporting portion side beam portions which extend from two positions of the detecting portion, which are different from each other, and in which both end portions on the detecting portion side of two mass portion side beam portions are connected to each other, and both end portions on the driving portion side of two supporting portion side beam portions are connected to each other.


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